| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 740592 | Sensors and Actuators A: Physical | 2006 | 6 Pages |
Abstract
Systems that employ electron beams like electron microscopes or devices for electron beam welding all require high vacuum technology to handle the electrons. This paper describes design, simulation and realization of electron permeable membranes for use in future atmospheric micro electron sources.
Related Topics
Physical Sciences and Engineering
Chemistry
Electrochemistry
Authors
F. Haase, P. Detemple, S. Schmitt, A. Lendle, O. Haverbeck, T. Doll, D. Gnieser, H. Bosse, G. Frase,