Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
740620 | Sensors and Actuators A: Physical | 2006 | 6 Pages |
We outline a process methodology for the fabrication of light-weighted flexible polyimide based microelectrodes. These microelectrode arrays were designed to enable the investigation of outstanding issues related to the development of a retinal prosthetic device but are also applicable to many other biomedical applications including for example peripheral nerve stimulation. This process could equally well be applied to fabricating ultra-thin flex wiring. The proto-type devices consist of planar electrode arrays and tracking encapsulated between a base, and covering layer of polyimide with a total thickness of 16 μ m. A novel laser assisted method has been employed to liberate the devices non-destructively from the carrier substrate in a planar unstressed format. A review of the ablation process optimisation and cyto-toxicity testing results will be presented.