| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 740634 | Sensors and Actuators A: Physical | 2006 | 7 Pages |
Abstract
The production of bolometers involves various processes. Those which are most likely to interfere with the operation of the sensors are the depositon of the porous gold (gold-black) layer used as an infrared absorber and the poly-Si etching used to form resistive devices. In this paper, we present an appropriate process for the deposition of porous gold for far-infrared detection, and provide a comparison of wet and plasma etching of poly-Si.
Related Topics
Physical Sciences and Engineering
Chemistry
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Authors
Roberto R. Neli, Ioshiaki Doi, José A. Diniz, Jacobus W. Swart,