Parallel direct laser writing of micro-optical and photonic structures using spatial light modulator

•Predefined patterns are proposed for parallel fabrication of microstructures.•The quantity and position of the multiple foci can be flexibly controlled.•Parallel fabrication of arbitrary distributed microlens array is demonstrated.•Efficient fabrication of 3D photonic structures is also demonstrated.

Two-photon polymerization (2PP) is a powerful tool for direct laser writing of micro-optical and photonic structures due to its flexibility in 3D structuring and sub-micrometer resolution. However, it can be time consuming to fabricate arrays of micro-optical devices and complex photonic structures. In this study, we propose to use predefined patterns (PPs) for parallel 2PP processing. A PP contains a multiple focal spot pattern optimized for the fabrication of certain microstructures. PP can be created by holographic laser beam modulation with a spatial light modulator (SLM). The quantity and position of the multiple foci can be flexibly and precisely controlled by predesigned computer generated holograms (CGHs). With these specially designed PPs, parallel fabrication of arbitrary distributed microlens arrays and 3D photonic structures is demonstrated. This method significantly improves throughput and flexibility of the 2PP technique and can be used for mass production of functional devices in micro-optics and photonics.