Application of optical 3D measurement on thin film buckling to estimate interfacial toughness

•We introduce the entropy based focus measure into the SFF in microscale.•We measure the 3D morphology of telephone cord wrinkle of thin film using SFF in micro scale.•We analyze stability of telephone cord wrinkle by FEM and compare the obtained results to the experimental result.•We discuss the application of SFF in the measurement of interfacial energy of film/substrate structure.

The shape-from-focus (SFF) method has been widely studied as a passive depth recovery and 3D reconstruction method for digital images. An important step in SFF is the calculation of the focus level for different points in an image by using a focus measure. In this work, an image entropy-based focus measure is introduced into the SFF method to measure the 3D buckling morphology of an aluminum film on a polymethylmethacrylate (PMMA) substrate at a micro scale. Spontaneous film wrinkles and telephone-cord wrinkles are investigated after the deposition of a 300 nm thick aluminum film onto the PMMA substrate. Spontaneous buckling is driven by the highly compressive stress generated in the Al film during the deposition process. The interfacial toughness between metal films and substrates is an important parameter for the reliability of the film/substrate system. The height profiles of different sections across the telephone-cord wrinkle can be considered a straight-sided model with uniform width and height or a pinned circular model that has a delamination region characterized by a sequence of connected sectors. Furthermore, the telephone-cord geometry of the thin film can be used to calculate interfacial toughness. The instability of the finite element model is introduced to fit the buckling morphology obtained by SFF. The interfacial toughness is determined to be 0.203 J/m2 at a 70.4° phase angle from the straight-sided model and 0.105 J/m2 at 76.9° from the pinned circular model.