Article ID Journal Published Year Pages File Type
746091 Optics and Lasers in Engineering 2009 4 Pages PDF
Abstract

Selective illumination of a silicon wafer can be used for the construction of non-permanent inductive grids. A numerical model is used for the calculation of plasma density distribution in silicon as a function of time. Some indicative results on the microwave properties of the device are presented.

Related Topics
Physical Sciences and Engineering Engineering Electrical and Electronic Engineering
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