Article ID Journal Published Year Pages File Type
746383 Optics and Lasers in Engineering 2009 7 Pages PDF
Abstract

In this paper, vibration measurement and analysis of microsystems, such as micro-electro-mechanical systems (MEMS) by using stroboscopic digital speckle pattern interferometry (DSPI) is presented. Because of the speckle interferometry, the technique is suited for samples which have a rough surface or whose surfaces can be sprayed into a scattering surface. A laser speckle microinterferometer incorporated with optoelectronic devices for a stroboscopic illumination and a synchronization of the signals between excitation and stroboscopic illumination is described and demonstrated. The system can measure both out-of-plane and in-plane displacement under either a static or dynamic loading. The fundamental is explained and some applications are demonstrated.

Related Topics
Physical Sciences and Engineering Engineering Electrical and Electronic Engineering
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