Replication of microchannel structures in polymers using laser fabricated glass–ceramic stamp

A new microreplication process with photo-etchable glass–ceramic stamps and polymers is presented. This process has two main advantages: a rapid master fabrication with a laser process and a flexible replication process compared with conventional nano- or microreplication technique on polymers. Photo-etchable glass–ceramics are used for the master stamp. Micropatterns can be rapidly transferred with a laser direct writing process and the removal of the glass–ceramics can be efficiently achieved with a wet etching process. Therefore, microstructures with flat bottom surfaces and straight sidewall structures can be obtained, which is difficult in the laser direct writing process. A microstamping process of applying heat and pressure, also referred to as hot embossing lithography or microstamping, can replicate microstructures on polymer surfaces. In this work, the fabricated glass–ceramic stamps are used for the replication process and various replicated polymer microstructures are presented.