| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 746869 | Optics and Lasers in Engineering | 2007 | 5 Pages |
Abstract
Using active and programmable focal-spot shaping, we demonstrate direct femtosecond laser micro-structuring of materials. Surface marking as well as drilling with user-defined geometrical shapes of small dimensions (20 μm) are performed, without moving the laser beam nor the material target.
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Authors
N. Sanner, N. Huot, E. Audouard, C. Larat, J.-P. Huignard,