Deep micro-machining of poly-ethylene terephthalate for plastic MEMS applications

Etching of poly-ethylene terephathalate (PET) is achieved using a chemical solution in di-methyl-formamide assisted by ultra-violet illumination. Deep vertical features suitable for plastic micro-machining, are obtained with features of the order of 2 μm and aspect ratios of the order of 10. By using tin (Sn) as the masking layer, the problem of crack formation on the PET surface during this photochemical etching technique is totally resolved. High etch-rates as 20 μm/h are obtained at a low etching temperature of 60 °C. To improve the thermal dissipation during the etching and to minimize the plastic shrinkage, a layer of silicone–rubber is applied on the backside of the PET. We have successfully fabricated and assembled an all-plastic one directional micro-valve. Preliminary plastic-based micro-structures are demonstrated.