| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 748160 | Solid-State Electronics | 2013 | 6 Pages |
•Simulation suggesting a possible mechanism for piezoelectric coupling in graphene.•Novel pressure sensor design based on graphene membranes.•Highly scalable graphene pressure sensors.
A novel pressure sensor based on a suspended graphene membrane is proposed. The sensing mechanism is explained based on tight binding calculations of strain-induced changes in the band structure. A CMOS compatible fabrication process is proposed and used to fabricate prototypes. Electrical measurement data demonstrates the feasibility of the approach, which has the advantage of not requiring a separate strain gauge, i.e. the strain gauge is integral part of the pressure sensor membrane. Hence, graphene membrane based pressure sensors can in principle be scaled quite aggressively in size.
