Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
748280 | Solid-State Electronics | 2011 | 5 Pages |
Lead zirconate titanate, Pb(Zr0.53,Ti0.47)O3 or PZT, thin films and integrated cantilevers have been fabricated for energy harvesting applications. The PZT films were deposited on PECVD SiO2/Si substrates with a sol–gel derived ZrO2 buffer layer. It is found that lead content in the starting solution and ramp rate during film crystallization are critical to achieving large-grained films on the ZrO2 surface. The electrical properties of the PZT films were measured using metal–ferroelectric–metal and inter-digital electrode structures, and revealed substantial improvement in film properties by controlling the process conditions. Functional cantilevers are demonstrated using the optimized films with output of 1.4 V peak-to-peak at 1 kHz and 2.5 g.
► Thin film and cantilever processes have been developed to harvest energy from vibration. ► A 1.4 Vp-p was extracted from mechanical vibrations at 1 kHz and 2.5 g. ► Fabrications of PZT cantilever trough a wet/dry etch process. ► Optimization of the piezoelectric thin films properties to yield the piezoelectric desired phase and morphology on cantilevers.