Higher-κ titanium dioxide incorporating LaAlO3 as dielectrics for MIM capacitors

In this work, we studied a TiO2 mixed LaAlO3 dielectric (TLAO) for metal–insulator–metal (MIM) capacitors. The resulting capacitor characteristics showed a high capacitance density of 23.2 fF/μm2 and a low leakage current of 7.5 × 10−7 A/cm2 at −1 V. Comparing to the control samples of TiLaO (TLO), TLAO dielectrics with Al2O3 doping showed lower leakage current, smaller voltage nonlinearity and better time-dependent dielectric breakdown (TDDB) performance. Therefore, the TiO2-based dielectrics with the introduction of Al2O3 might be favorable for the improved engineering of MIM capacitors.