Motion control of piezoceramic actuators with creep, hysteresis and vibration compensation

•We present a new integrated controller to compensate for the creep, hysteresis and vibration effects of the piezoceramic actuator.•The direct inverse compensation method is proposed to mitigate the asymmetric hysteresis.•A notch filter is designed to damp the vibration effect of the hysteresis compensated system.•A PI feedback controller with high control gains is developed to handle the creep nonlinearity, and modeling uncertainties.•Comparative experimental results are presented to demonstrate the better performances of the proposed control strategy.

In this paper, we develop a new integrated control strategy with creep, hysteresis and vibration compensation to achieve the high-performance motion control of piezoceramic actuators. For this purpose, the direct inverse compensation method is firstly applied to mitigate the asymmetric hysteresis nonlinearity without involving inverse model calculation. The hysteresis caused error is reduced by up to 81.35% to clearly verify the effectiveness of the proposed method. Then, a notch filter is designed to damp the vibrational dynamics of the compensated system, i.e., the plant with inverse hysteresis compensation, which increases the gain margin of the system from 5.4 dB to 21.7 dB. Finally, the feedback controller is developed to handle the creep nonlinearity, and modeling uncertainties of the system with hysteresis and vibration compensation. The developed integrated controller is demonstrated to improve the bandwidth of the piezo-actuated positioning system from 65 Hz to 605 Hz. With respect to variations of input frequencies, comparative experimental results are further presented to confirm the significantly better performances of the proposed control strategy in terms of speed and accuracy.