Arrays of large-area, tip/tilt micromirrors for use in a high-contrast projector

Arrays of two-degree of freedom analog micromirrors are designed for use within an high-contrast projector and fabricated using a multi-user MEMS fabrication process. We demonstrate a novel way of optimizing the tradeoffs between tilt angle and mirror size by subdividing the mirrors into smaller functional subsections that move synchronously. The mirror design employs multiple mirrors within a gimbal frame. The frame rotates around one axis, and each mirror within the frame rotates around a perpendicular axis, resulting in two-degree of freedom rotation. The design employs specific electrode shapes to allow one-layer connections. Using these fabricated mirrors, simultaneous actuation of mirrors within a composite structure is achieved. A prototype array of fabricated mirrors is described, with 6 × 5 mirrors each of 160 μm × 160 μm forming one composite mirror of an array, giving total active area of 960 μm × 800 μm. The mirrors can achieve a maximum tilt angle of 2.25°. The fill factor of this design is 68%.