| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 749253 | Sensors and Actuators A: Physical | 2010 | 8 Pages |
Abstract
Mechanically resonant ferromagnetic MEMS sensors intended for magnetic field gradient measurements are presented. Suspended quad-beams with proof mass have been designed to improve their sensitivity and to simplify the detection. Fabricated devices exhibit the compact size of current MEMS technologies and are built within a simple deep-reactive-ion etching-based process. Nanometer-resolution detection based on optical interferometry and signal processing techniques have been employed to find out dynamic-mode transformation factors of 6.25 × 10−3 T/m/Hz with 0.1-Hz resolution. The device performs in situ gradiometry with a single-sensor structure, which represents a technological advance to current-art gradiometers.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Electrochemistry
Authors
Humberto Campanella, R.P. del Real, Marta Duch, Christophe Serre, I. Lucas, V. De Manuel, Héctor Guerrero, Jaume Esteve, Marina Díaz-Michelena, José A. Plaza,