Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
749371 | Solid-State Electronics | 2007 | 5 Pages |
Abstract
This paper describes realization and characterization of SrTiO3 (STO) high K MIM capacitors above BiCMOS integrated circuit (IC). These capacitances are connected to IC and are used as coupling capacitors in order to realize a high pass filter. Surface capacitance achieved is 10 nF/mm2 with capacitance value of 1.2 nF. The process for STO MIM fabrication does not exceed 400 °C, which is compatible with interconnections. Typical K and dielectric losses values obtained are, respectively 110% and 2%. Yield obtained reaches 83% for capacitors. A functional high pass filter using these STO capacitors was realized in this study. It exhibits a cut-off frequency at 6.5 kHz and a constant gain at higher frequencies of â1.3 dB.
Related Topics
Physical Sciences and Engineering
Engineering
Electrical and Electronic Engineering
Authors
Emmanuel Defaÿ, David Wolozan, Jean-Pierre Blanc, Emmanuelle Serret, Pierre Garrec, Sophie Verrun, Denis Pellissier, Philippe Delpech, Julie Guillan, Bernard André, Laurent Ulmer, Marc Aïd, Pascal Ancey,