Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
749390 | Solid-State Electronics | 2007 | 7 Pages |
Abstract
Cylindrical solid-state nanopores with 40 nm diameter were fabricated in silicon-on-insulator substrates using standard cleanroom semiconductor processing techniques. Here we report on a fabrication sequence which consistently produced robust nanopores with control over the final diameter. The electrolyte concentration dependence of ion transport through a single nanopore was measured over the range of 0.316 mM to 1 M. Experimentally measured values follow the bulk linear behavior at high concentrations but deviate from the simple model at lower concentrations. These deviations were modeled using a surface charge conduction mechanism.
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Authors
Leo Petrossian, Seth J. Wilk, Punarvasu Joshi, Sahar Hihath, Jonathan D. Posner, Stephen M. Goodnick, Trevor J. Thornton,