Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
749406 | Sensors and Actuators A: Physical | 2009 | 6 Pages |
Abstract
This paper describes the design and principle behind the demonstrated novel lamellar grating out-of-plane gyroscope design. The sensing mechanism is based on out-of-plane motion of movable light-reflecting beams changing the phase relationship between the light reflected off the two sets of beams. This phase relationship is manifested as an intensity change in the zeroth-order diffracted light. The device consists of two in-plane 180° out-of-phase vibrating masses with a set of overlapping light-reflecting beams behaving essentially as a lamellar grating. The commercial SOI-MUMPS process was used to fabricate a prototype. The gyroscope demonstrated a sensitivity of 17.8 μV/(°/s) and linearity error of less than 0.6%. Design issues were addressed and show promise to be overcome. Post-fabrication tuning and better optics design can improve the performance greatly with respect to the current prototype setup.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Electrochemistry
Authors
Guangya Zhou, Kelvin K.L. Cheo, Yu Du, Fook Siong Chau,