Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
749412 | Sensors and Actuators A: Physical | 2009 | 6 Pages |
Abstract
We present the first adaptive fluidic PDMS-lens system with an integrated piezoelectric pumping actuator. The system is fabricated in a highly streamlined fabrication process through casting using a hot embossing machine and the subsequent oxygen plasma bonding of the layers. With a shape optimized piezo actuator the achieved focal length ranges from 30 to 500 mm at a voltage from −9 to 44 V. We show that the lens resolution is crucially dependent on the thickness of the lens membrane. For an optimum thickness of 70 μm at 5 mm diameter the lenses achieve a resolution of 134 linepairs/mm (daperture = 2.5 mm) at a contrast of 50%.
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Physical Sciences and Engineering
Chemistry
Electrochemistry
Authors
F. Schneider, J. Draheim, C. Müller, U. Wallrabe,