Multi-domain simulation using VHDL-AMS for distributed MEMS in functional environment: Case of a 2D air-jet micromanipulator

In this paper, the authors report about recent achievement in distributed Micro Electro Mechanical Systems (MEMS) behavioral modeling, allowing both easy development and faster simulation for better integration of arrayed MEMS into systems. Design and simulation are produced by solver-based cost-effective solution using VHDL-AMS. A hierarchical circuit-level design methodology has been followed to model and simulate a MEMS array-based smart surface applied in air–fluid environment for 2D contactless micromanipulation. Using a V-shaped-based design approach, a top-down VHDL-AMS-based modeling has been first achieved with behavioral, structural behavioral, and component models, which include a MEMS-based pneumatic microactuator. Then, a modeling bottom-up approach has been developed to validate our design by comparing simulations and experiments of the distributed surface. Good agreements of resulting simulations have been successfully provided at all abstraction levels proving capability and facility of using VHDL-AMS for coupled distributed physical models.