| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 749846 | Sensors and Actuators A: Physical | 2008 | 10 Pages |
Abstract
A novel electrostatic sideways actuation drop dispenser (a sideshooter) is presented. The polysilicon Micro-Electro-Mechanical System (MEMS) drop dispenser is surface micromachined using the SUMMiT™ fabrication process. The dispenser was used to eject satellite free 0.25 pl drops of aqueous solution at 10 m/s using an 80 V pulse 10 μs long. The dispenser enables multiple liquid, viscosity, and drop size, integrated ejection microsystems; useful for wet nano-fabrication.
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Authors
Paul Galambos, Dave Czaplewski, Rick Givler, Kenneth R. Pohl, David L. Luck, Gilbert Benavides, Bernie Jokiel,