A single cell electrophysiological analysis device with embedded electrode

A single cell electrophysiological analysis device with a sub-micrometer opening on embedded recording electrode has been demonstrated using a combined micro- and nano-machining process. This technique can reduce the series pipette resistance while keeping high seal resistance for electrophysiological measurements. In the prototype demonstration, the electrolyte pipette resistance is reduced to 200 kΩ using the microfabricated electrophysiological system with opening size of 500 nm in diameter. A 6 GΩ seal resistance is achieved on a HeLa cell, a cervical cancer cell line with size between 10 and 20 μm, on the same device. In a second experiment, the measured electrolyte pipette resistance is 1 MΩ using different pipette solution on a device with 800 nm opening and a 500 MΩ seal resistance is achieved on a vacuolar yeast cell of 3–5 μm in size.