| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 749988 | Sensors and Actuators A: Physical | 2007 | 7 Pages |
Design, fabrication and tests of a monolithic compliant-flexure-based microgripper were performed. The geometry design and the material stresses were considered through the finite element analysis. The simulation model was used to study in detail profiles of von Mises stresses and deformation. The maximum stress in the microgripper is much smaller than the critical stress values for fatigue. The microgripper prototype was manufactured using micro-wire electrode discharge machining. A displacement amplification of 3.0 and a maximum stroke of 170 μm were achieved. The use of piezoelectric actuation allowed fine positioning. Micromanipulation tests were conducted to confirm potential applications of the microgripper with piezoelectric actuation in handling micro-objects. The simulation and experimental results have proven the good performance of the microgripper.
