| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 750059 | Sensors and Actuators A: Physical | 2006 | 6 Pages |
Abstract
A thermally driven micro-electrostatic fieldmeter is reported, which mainly consists of sense electrodes, grounded shuttle electrodes, bent beam thermal driver, etc. The bent beam thermal driver is driven with a square wave of amplitude as low as ±2 V amplitude and of frequency as high as 20 kHz. The electric field intensity resolution of the electrostatic fieldmeter can reach 240.8 V/m.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Electrochemistry
Authors
Xianxiang Chen, Chunrong Peng, Hu Tao, Chao Ye, Qiang Bai, Shaofeng Chen, Shanhong Xia,