| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 752933 | Acta Mechanica Solida Sinica | 2009 | 5 Pages |
Abstract
We study the effect of surface roughness on the resonance frequency of micro-cantilever sensors. The analysis demonstrates that surface roughness can enhance, decrease or even annul the effect of surface stress on the resonance frequency, depending on the surface inclination angle and the Poisson ratio of the coating film on the cantilever.
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