Article ID Journal Published Year Pages File Type
752989 Solid-State Electronics 2012 5 Pages PDF
Abstract

We report a study on the fabrication and characterization of ultraviolet photodetectors based on N-doped ZnO films. Highly oriented N-doped ZnO films with 10 at.% N doping are deposited using spray pyrolysis technique onto glass substrates. The photoconductive UV detector based on N-doped ZnO thin films, having a metal–semiconductor–metal (MSM) configuration are fabricated by using Al as a contact metal. I–V characteristic under dark and UV illumination, spectral and transient response of ZnO and N-doped ZnO photodetector are studied. The photocurrent increases linearly with incident power density by more than two orders of magnitude. The photoresponsivity (580 A/W at 365 nm with 5 V bias, light power density 2 μW/cm2) is much higher in the ultraviolet region than in the visible.

► Fabrication of photoconductive UV detector by using spray pyrolysis. ► Photoconductive UV detector based on N-doped ZnO thin films having MSM configuration. ► I–V characteristic, spectral and transient response of N-doped ZnO photodetector.

Related Topics
Physical Sciences and Engineering Engineering Electrical and Electronic Engineering
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