Analytical analysis of mems capacitive pressure sensor with circular diaphragm under dynamic load using differential transformation method (DTM)

In this paper, first a circular diaphragm is modeled using the classical plate theory. An analytical solution based on differential transformation method (DTM) and Runge-Kutta method is employed for solving the governing differential equation for the first time. Then the influences of various parameters on central deflection of the diaphragm, stress distribution and capacitance of pressure sensor with a time-dependent pressure are examined. Several case studies are compared with simulations to confirm the proposed method. The analytical results compared with ABAQUS simulation show excellent agreement with the simulation results. This method is very promising for time saving in calculating micro-device characteristics.