A linear time-of-flight mass spectrometer with relatively high resolution for diagnostic of high energy ion beam

- An especial linear TOF MS for vacuum arc discharge ion source was developed.
- The linear TOF MS has a wire type ion gate and a 1.5 m drift tube.
- The accelerating voltage of ion beam reaches 40 kV and the resolution is 120 (FWHM).
- The compositions of ions in the first few μs of discharge process, with O+, C+, O2+ and C2+ dominating.
- It provides an effective detection means for plasma because of relatively high resolution.