| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 7605090 | International Journal of Mass Spectrometry | 2014 | 4 Pages |
Abstract
- Investigation of sputtering of a N saturated W surface by Arq+ and Neq+ projectiles.
- No dependency of the sputtering yield on the projectile charge state.
- Erosion higher for Ar bombardment than for Ne (purely kinetic sputtering).
- Reduction of W sputtering from WN surfaces balanced by N erosion (Ytot comparable).
Related Topics
Physical Sciences and Engineering
Chemistry
Analytical Chemistry
Authors
K. Dobes, V. Smejkal, T. Schäfer, F. Aumayr,