| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 7614518 | Journal of Chromatography A | 2013 | 4 Pages |
Abstract
⺠We analyzed impurities in a high-purity carbon monoxide gas of semiconductor grade. ⺠A compact micro gas chromatograph was used for the impurity analyses. ⺠High-accuracy calibration gas mixtures by gravimetric blending method were used. ⺠The concentration of helium was found to be much higher than the other impurities. ⺠The purity of the high-purity gas was around 99.996% based on our analyses.
Related Topics
Physical Sciences and Engineering
Chemistry
Analytical Chemistry
Authors
Nobuhiro Matsumoto, Takuro Watanabe, Kenji Kato,