| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 7644590 | Microchemical Journal | 2013 | 5 Pages |
Abstract
⺠CH4/N2 plasmas were measured spectroscopically. ⺠CH radicals profile was visualized. ⺠Molar ratio of N2 affected spatial density of CH significantly. ⺠Gas temperature is likely a dominate factor on surface morphology.
Related Topics
Physical Sciences and Engineering
Chemistry
Analytical Chemistry
Authors
Qingchun Shen, Yasushi Miyata, Toshiki Suzuki, Shigeaki Morita, Kuniyuki Kitagawa,