| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 7674715 | Spectrochimica Acta Part B: Atomic Spectroscopy | 2014 | 5 Pages |
Abstract
A survey was carried out with users and manufacturers of Total Reflection X-ray Fluorescence instrumentation in order to demonstrate the worldwide distribution of TXRF equipment and the different fields of applications. In general, TXRF users come from universities and scientific institutes, from working places at synchrotron beam-lines, or laboratories in semiconductor fabs. TXRF instrumentation is distributed in more than 50 countries on six continents and is applied at about 200 institutes and laboratories. The number of running desktop instruments amounts to nearly 300Â units. About 60 beamlines run working places dedicated to TXRF. About 300 floor-mounted instruments are estimated to be used in about 150 fabs of the semiconductor industry. In total, 13 different fields of applications could be registered statistically from three different aspects.
Related Topics
Physical Sciences and Engineering
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Authors
Reinhold Klockenkämper, Alex von Bohlen,