Article ID Journal Published Year Pages File Type
7747308 Solid State Ionics 2012 5 Pages PDF
Abstract
► We report the fabrication of YSZ pinhole-free self-supported membranes for µSOFC. ► Control of particulate ejection from the target during thin film deposition process. ► Strategy based on using spark plasma sintered 3YSZ targets for thin film deposition.
Related Topics
Physical Sciences and Engineering Chemistry Electrochemistry
Authors
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