| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 7748195 | Coordination Chemistry Reviews | 2013 | 20 Pages |
Abstract
⺠Precursor synthesis and thin film deposition for metal oxides and pnictides. ⺠Preliminary mechanistic studies for the decomposition of metal alkoxides. ⺠A comparison of precursors used in different methodologies. ⺠Modified alkoxides have been shown to provide more stability. ⺠Aerosol-assisted CVD addresses the delivery problems associated with single-source precursors.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Inorganic Chemistry
Authors
Peter Marchand, Claire J. Carmalt,