Article ID Journal Published Year Pages File Type
7748215 Coordination Chemistry Reviews 2013 17 Pages PDF
Abstract

- Energy-enhanced ALD allows for a wider choice of precursors.
- More stable precursors allow for higher deposition temperatures to be reached.
- Energy-enhanced ALD enables low-temperature, and even room-temperature, ALD.
- Good to fair films can be deposited at room temperature with energy-enhanced ALD.
Related Topics
Physical Sciences and Engineering Chemistry Inorganic Chemistry
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