Effect of geometric nonlinearity on dynamic pull-in behavior of coupled-domain microstructures based on classical and shear deformation plate theories

This paper investigates the dynamic pull-in behavior of microplates actuated by a suddenly applied electrostatic force. Electrostatic, elastic and fluid domains are involved in modeling. First-order shear deformation plate theory and classical plate theory are used to model the geometrically nonlinear microplates. The equations of motion are descritized by the finite element method. The effects of nonlinearity, fluid pressure, initial stress and different geometric parameters on dynamic behavior are examined. In addition, the influences of initial stress and actuation voltage on oscillatory behavior of microplates are evaluated.