Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
7751308 | Inorganica Chimica Acta | 2014 | 10 Pages |
Abstract
Cobalt(II) siloxide complexes are employed as single-source precursors for the aerosol-assisted CVD of thin films with bulk compositions reflecting the cobalt, silicon and oxygen stoichiometry of the molecular precursor complex.52
Related Topics
Physical Sciences and Engineering
Chemistry
Inorganic Chemistry
Authors
Michael S. Hill, Andrew L. Johnson, Troy D. Manning, Kieran C. Molloy, Benjamin J. Wickham,