Article ID Journal Published Year Pages File Type
7751308 Inorganica Chimica Acta 2014 10 Pages PDF
Abstract
Cobalt(II) siloxide complexes are employed as single-source precursors for the aerosol-assisted CVD of thin films with bulk compositions reflecting the cobalt, silicon and oxygen stoichiometry of the molecular precursor complex.52
Related Topics
Physical Sciences and Engineering Chemistry Inorganic Chemistry
Authors
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