Fabrication of free-form surfaces using a long-stroke fast tool servo and corrective figuring with on-machine measurement

Fabrication of free-form surfaces that are frequently demanded for the construction of optical imaging systems is described. To obtain a tool motion with large amplitude and high bandwidth, a novel long-stroke fast tool servo is proposed and installed on the Z-axis of a diamond turning machine as an additional synchronized axis. In addition, a special on-machine measurement device is used to measure the optical parameters of the machined surface and to compensate for the residual form of errors that are commonly produced in the diamond turning process. Actual machining test results show that the proposed procedures are capable of generating the copper free-form mirrors of 50 mm diameter to a form accuracy of 0.15 μm in peak-to-valley value error.