| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 781968 | International Journal of Machine Tools and Manufacture | 2010 | 8 Pages |
Abstract
A new metrological AFM is developed for the Dutch standards laboratory. This instrument consists of a translation stage with a stroke of 1×1×1 mm and a custom-designed AFM measurement head. Here the design of the translation stage, consisting of elastic straight guides, Lorentz-actuators with weight and stiffness compensation and interferometric translation measurement systems, will be discussed. Some preliminary results on the performance of the actuation system are presented.
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Physical Sciences and Engineering
Engineering
Industrial and Manufacturing Engineering
Authors
C. Werner, P.C.J.N. Rosielle, M. Steinbuch,