• Daneshyari
  • Topics
    • Physical Sciences and Engineering
      Life Sciences
      Health Sciences
      Social Sciences and Humanities
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry

Direct bonding of silicon and quartz glass using VUV/O3 activation and a multistep low-temperature annealing process

Article ID Journal Published Year Pages File Type
7833412 Applied Surface Science 2018 7 Pages PDF
Keywords
Bonding interfaceSurface activationVacuum ultravioletLow-temperature bonding
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Preview
Direct bonding of silicon and quartz glass using VUV/O3 activation and a multistep low-temperature annealing process
Authors
Jikai Xu, Chenxi Wang, Te Wang, Yannan Liu, Yanhong Tian,
Related Articles
Bioabsorbable radiopaque water-responsive shape memory embolization plug for temporary vascular occlusion
Contractility as a global regulator of cellular morphology, velocity, and directionality in low-adhesive fibrillary micro-environments
Overcoming foreign-body reaction through nanotopography: Biocompatibility and immunoisolation properties of a nanofibrous membrane
Substrate-mediated reprogramming of human fibroblasts into neural crest stem-like cells and their applications in neural repair
A comprehensive review on droplet-based bioprinting: Past, present and future
Therapeutic assessment of mesenchymal stem cells delivered within a PEGylated fibrin gel following an ischemic injury
Engineered human vascularized constructs accelerate diabetic wound healing
Implantable tissue-engineered blood vessels from human induced pluripotent stem cells
Highly wear-resistant and biocompatible carbon nanocomposite coatings for dental implants
Shh pathway in wounds in non-diabetic Shh-Cre-eGFP/Ptch1-LacZ mice treated with MAA beads
Journal
Applied Surface Science
Journal: Applied Surface Science
Related Categories
Bonding interface
Surface activation
Vacuum ultraviolet
Low-temperature bonding
Analytical Chemistry
Chemistry (General)
Electrochemistry
Inorganic Chemistry
Organic Chemistry
Physical and Theoretical Chemistry
Spectroscopy
Related Journals
Computational Biology and Chemistry
Journal of Photochemistry and Photobiology A: Chemistry
Journal of Photochemistry and Photobiology B: Biology
Journal of Photochemistry and Photobiology C: Photochemistry Reviews
Journal of Molecular Catalysis A: Chemical
Electrochemistry Communications
Electrochimica Acta
Fluid Phase Equilibria
Journal of Electroanalytical Chemistry
The Journal of Supercritical Fluids
Procedia Chemistry
Journal of Molecular Graphics and Modelling
Computer Physics Communications
Advances in Colloid and Interface Science
Colloid and Interface Science Communications
Colloids and Surfaces A: Physicochemical and Engineering Aspects
Colloids and Surfaces B: Biointerfaces
Current Opinion in Colloid & Interface Science
Journal of Colloid and Interface Science
Thermochimica Acta
Journal of Cultural Heritage
Chemical Data Collections
International Journal of Mass Spectrometry
Daneshyari provides fulltext access to millions of research papers.