A qualitative analysis of designs of micromachined electromagnetic inductive contactless suspension

•We present a qualitative analytical approach to the study of designs of the MIS.•The approach describes analytically the dynamics of a MIS design and its stability.•Using this approach, a new 3D design of the MIS is proposed.•This new design allows us to increase significantly lateral stiffness of the MIS.

This article presents a qualitative analytical approach to the study of designs of Micromachined electromagnetic Inductive contactless Suspension (MIS). The analytical approach is developed based on the generalized reduced linear model of the MIS, which describes the dynamics of a levitated disk shaped proof mass in space, near an equilibrium point. The proof mass is levitated in an electromagnetic field created by a ring shaped coil. The model allows us to express the dynamical parameters of the suspension and obtain the condition of its stability analytically. In the framework of the developed approach, we propose a new 3D design of the suspension with significantly increased lateral stiffness.