A comparative study on the direct deposition of μc-Si:H and plasma-induced recrystallization of a-Si:H: Insight into Si crystallization in a high-density plasma

Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry

H.P. Zhou, M. Xu, S. Xu, Y.Y. Feng, L.X. Xu, D.Y. Wei, S.Q. Xiao,