| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 7845292 | Surface Science Reports | 2011 | 31 Pages |
Abstract
⺠We present a review in the field of interaction of atomic and molecular clusters with solids. ⺠We focus on clusters produced in the gas phase. ⺠We show how the physics of the cluster-matter interaction depends on the kinetic energy. ⺠Different interaction regimes are discussed: cluster deposition, sputtering and implantation. ⺠Use of cluster beams for various practical applications is overviewed.
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Vladimir N. Popok, Ingo Barke, Eleanor E.B. Campbell, Karl-Heinz Meiwes-Broer,