Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
7845602 | Surface Science Reports | 2007 | 27 Pages |
Abstract
The deposition of metals on semiconductors encompasses a broad range of technologically important processes, with applications ranging from electronic devices to chemical sensors. Recent years have witnessed a surge of research activities in galvanic displacement processes on semiconductor substrates. After a brief review of the fundamental aspects underlying galvanic displacement processes on semiconductor surfaces, this paper discusses applications to micro- and nanoscale devices, including schemes developed for the metallization and nanopatterning of semiconductor substrates with high selectivity and with optimal interfacial properties.
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Carlo Carraro, Roya Maboudian, Luca Magagnin,