Particular structural defects in Ta2O5 from crystallisation of amorphous thin films in O2-H2O atmosphere

(a,b) HRTEM images of structural defects in mL-Ta2O5 monoclinic structures resulting of a crystallisation of amorphous thin films in O2-H2O atmosphere compared in (c) to simulated images of the 11L-Ta2O5 structure with [001] columns of Ta5+-O2− vacancies or only Ta5+ vacancies; (d) ToF-SIMS depth profiles of H−, 18O−, TaO− and 30Si− through a Ta2O5 thin film on Si substrate.389