Wet-etch texturing of ZnO:Ga back layer on superstrate-type microcrystalline silicon solar cells

Surface wet etching is applied to the ZnO:Ga (GZO) back contact in μc-Si thin film solar cells. GZO transparency increases with increasing deposition substrate temperature. Texturing enhances reflective scattering, with etching around 5–6 s producing the best scattering, whereas etching around 5 s produces the best fabricated solar cells. Etching beyond these times produces suboptimal performance related to excessive erosion of the GZO. The best μc-Si solar cell achieves FF=68%, VOC=471 mV and JSC=21.48 mA/cm2 (η=6.88%). Improvement is attributed to enhanced texture-induced scattering of light reflected back into the solar cell, increasing the efficiency of our lab-made single μc-Si solar cells from 6.54% to 6.88%. Improved external quantum efficiency is seen primarily in the longer wavelengths, i.e. 600–1100 nm. However, variation of the fabrication conditions offers opportunity for significant tuning of the optical absorption spectrum.

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