Article ID Journal Published Year Pages File Type
7895032 Corrosion Science 2015 10 Pages PDF
Abstract
Monoatomic ion guns mounted on X-ray photoelectron spectrometers are frequently used for depth profiling to determine the depth distribution of various chemical compounds, or for surface cleaning. Sputtering with single ions may cause severe damage to some materials. Hence, in this study the influence of different sputter parameters on the degradation kinetics was examined. For comparison, the potential of Ar cluster sputtering was tested with the same materials, namely hydrozincite and FeO - two representatives of corrosion products that are susceptible to degradation. Chemical damage could only be minimized by cooling or cluster sputtering within a narrow cluster energy window.
Related Topics
Physical Sciences and Engineering Materials Science Ceramics and Composites
Authors
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