Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
7898102 | Journal of the European Ceramic Society | 2018 | 7 Pages |
Abstract
Transparent and highly oriented 3C-SiC bulks were speedily fabricated at deposition temperature (Tdep) of 1623â¯K by halide laser chemical vapor deposition (HLCVD). The effect of total pressure (Ptot) on the optical transmittance, preferred orientation, microstructure, deposition rate (Rdep) and micro-hardness were investigated. The maximum Rdep of the transparent 3C-SiC reached 2450â¯Î¼m/h at Ptotâ¯=â¯10â¯kPa. With an increase in Ptot, the transmittance of 3C-SiC bulks increased firstly, and then decreased. At Ptotâ¯=â¯10â¯kPa, 3C-SiC bulk, a highly <111>-oriented and low density of defects, showed the highest transmittance, greater than 55% in the wavelength range of 800-1100â¯nm. At Ptotâ¯=â¯4â¯kPa and 20â¯kPa, 3C-SiC bulks showed much lower transmittance, in which contained poorly oriented grains and numerous defects. The Vickers micro-hardness of 3C-SiC bulks increased with increasing Ptot and showed the highest value of 34.8â¯GPa at Ptotâ¯=â¯40â¯kPa.
Related Topics
Physical Sciences and Engineering
Materials Science
Ceramics and Composites
Authors
Hong Cheng, Meijun Yang, Youfeng Lai, Mingwei Hu, Qizhong Li, Rong Tu, Song Zhang, Mingxu Han, Takashi Goto, Lianmeng Zhang,