Article ID Journal Published Year Pages File Type
7898408 Journal of the European Ceramic Society 2018 7 Pages PDF
Abstract
The hardness of thin films agree with structural observations. The highest hardness value (∼26 GPa) showed the c-TiC thin film with 67 at% Ti content. The nanohardness values showed decreasing character with increasing Ti content over 70 at.%. The lowest values of nanohardness (∼10 GPa) was observed for thin films with only h-Ti phase.
Related Topics
Physical Sciences and Engineering Materials Science Ceramics and Composites
Authors
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